Roller
內滾筒微影製程技術 Inner cylindrical Photolithography本實驗以創新的想法利用傳統的微影製程製作無縫的中空滾筒模仁，首先以一氣旋塗佈的方式在內滾輪表面塗佈光阻，接著以軟性光罩進行曲面步階式旋轉曝光。最後，可分別由PDMS澆鑄的方式或微電鑄的方式完成中空滾筒模仁。
This investigation a innovative approach for fabricating seamless hollow roller molds based on conventional photolithography. First of all, a mothod for spread coating of thin photo-layer on the hollow roller internal surface is developed. Secondly, a step -and-rotate UV-exposure system is construced for transforning patterns defined by photo-mask to the coated PR layer. Based on these two developments, seamless roller molds with fine and complicated surface features are obtained from either molding process (PDMS mold) or electroforming processes.
其他相關研究主軸
Other Researches
- 聲波感測元件與材料之非破壞檢測 (Acoustic Sensing Device and Non-destructive Evaluation)
- 半導體靶材缺陷之超音波影像 (Target Material Ultrasound Image Defect Inspection)
- 聲子晶體結構中的波傳效應 (Wave propagation in Phononic crystal structure)
- 準分子雷射微細加工 (Excimer Laser Micro Machining)
- 無光罩式斜掃描曝光系統 (Mask-less Dot Scanning Lithography System)
- 無光罩式外滾筒微影製成技術 (Mask-less Outer Cylindrical Photolithography)
- 壓電膜製作技術 (Technique of Fabricating Piezoelectric Film)
- 軟性光罩微影技術 (Soft Photo-mask Lithography)
- 平面奈米壓印 (Flat Nano-Imprinting)
- 奈米壓印 (Nano-Imprinting)
- 滾輪壓印 (Nano-Imprinting)
- 內滾筒微影製程技術 (Inner cylindrical Photolithography)
- 機械設備研發製作 (Research And Fabrication of Machines)