電 Electricity
壓電膜製作技術 Technique of Fabricating Piezoelectric Film本實驗室透過改良式溶膠凝膠法針對 1~20 μm 膜厚的 PZT 壓電陶瓷膜進行材料的開發，使其具備高品質且穩定的性能。目前透過改良式溶膠凝膠法可以得到膜厚範圍介於 2.4μm ~ 12.8μm的壓電厚膜。當膜厚為12.8μm時，在最大電場625kV/cm 的狀況下，殘餘極化向量為24.48μC/cm2，而矯頑電場為 122.72 kV/cm。
We focus on the development of high-quality and stable PZT thick film around 1 to 20 μm in thickness by modified sol-gel method. Films with a thickness in the range from 2.4μm to 12.8μm can be obtained by the improved sol-gel method. When the thickness of the film is 12.8μm, the maximum remanent polarization is 24.48μC/cm and the coercive field is 122.72 kV/cm at the maximum electric field, 625kV/cm.
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