奈米 Nano-Structure
奈米壓印 Nano-Imprinting本實驗室透過奈米壓印製程結合金屬轉印技術，於基板上佈值奈米金屬點，成功於可撓式基板上產生侷域性表面電漿共振效應(LSPR)，可用於製作曲面貼覆性質的感測元件，或更進一步地輔以蝕刻技術製作週期性微奈米結構，改善基板的光學特性，應用在節能玻璃上以減少熱輻射傳遞、於藍寶石基板上製作抗反射結構，大幅提升光穿透效率。目前研究方面也將由平面奈米壓印轉向於曲面壓印，致力於將微奈米圖形轉移至曲面透鏡上。
The fabrication of nanoparticles array by nano-imprinting and Metal contact printing photolithography enhance Localized surface plasmon resonance on flexible substrate for making surface-contacted sensor, furthermore, we fabricate periodic nanostructure with etching process to improving optical property. This application such like energy-saving glass, which decreasing heat radiation, or antireflection structure on sapphire in order to the significant enhancement of light extraction efficiency. In future work, our research will focus on the nano-patterned tranfer from flat to curved surface.
其他相關研究主軸
Other Researches
- 聲波感測元件與材料之非破壞檢測 (Acoustic Sensing Device and Non-destructive Evaluation)
- 半導體靶材缺陷之超音波影像 (Target Material Ultrasound Image Defect Inspection)
- 聲子晶體結構中的波傳效應 (Wave propagation in Phononic crystal structure)
- 準分子雷射微細加工 (Excimer Laser Micro Machining)
- 無光罩式斜掃描曝光系統 (Mask-less Dot Scanning Lithography System)
- 無光罩式外滾筒微影製成技術 (Mask-less Outer Cylindrical Photolithography)
- 壓電膜製作技術 (Technique of Fabricating Piezoelectric Film)
- 軟性光罩微影技術 (Soft Photo-mask Lithography)
- 平面奈米壓印 (Flat Nano-Imprinting)
- 奈米壓印 (Nano-Imprinting)
- 滾輪壓印 (Nano-Imprinting)
- 內滾筒微影製程技術 (Inner cylindrical Photolithography)
- 機械設備研發製作 (Research And Fabrication of Machines)