隨著科技產業蓬勃發展，本研究團隊於科技的推動也不遺 餘力，研究主題包含於奈米平壓微影技術、微米滾壓系統開 發、超音波探頭設計及雷射加工 3D 微細結構製程，並針對實 驗上之需求製作機台及相關配件。研發機台從設計製作、組裝 測試、系統整合等皆獨立完成，使得在製程上有相當大的自由 度。目前已開發油壓加壓系統之奈米壓印機、滾輪薄膜測試儀 等。奈米壓印機最大壓印力可超越當前壓印機可達之壓力，壓 印基板可達六吋，秉持符合產業自動化的原則，達到快速、簡 單、高效率的生產力，結合技術及人性化的考量。

There are several research subjects such as nano-imprinting lithography, ultrasonic engineering, and excimer laser machining in our lab, and we have ability to research and work out any machines for experimental needs. All parts of making any machine, from designing, fabricating, setting, testing, to integrating, can be completed on our own with great amounts of freedom.  Based  on  the  principle  of  auto mation  and  the consideration of user-friendly, oil-pressured nano-imprinting machine, thin-film roller coating machine, and so forth, were developed in our lab. Take nano-imprinting machine for example, it can easily get an amazingly imprinting area in size of 6 in. wafer with sufficient pressure in an automatic process; thus both of high throughput and easy process are not just a big dream in the semiconductor industry.